Dr. Bernhard Wagner is Deputy Director of Fraunhofer Institute for Silicon Technology (ISIT) in Itzehoe, Germany. He received his PhD in Physics from the University of Mainz, Germany in 1986, and then joined Fraunhofer ISIT working in field of microsystems and MEMS technology. His current research activities include physical sensors, RF-MEMS, optical MEMS, and piezoelectric thin-film transducers. Bernhard is Professor for Materials and Processes for Nanosystem Technologies at the Faculty of Engineering at Christian-Albrechts-University in Kiel.